RETICOLI IN NITRURO DI SILICIO PER BIOSENSORI

In this work, we report on the simulations of silicon nitride gratings for sensing applications. Silicon nitride is a high-index material suitable for photonic circuits and application in the visible wavelength. The device was designed by means of the commercial software Comsol Multiphysic that implements the Finite Element Method (FEM). In particular, we simulated gratings with different height, duty cycle and mesh to obtain the best transmission in the visible wavelength. We also studied the characteristic of the plane wave propagating through free space in a normal incident upon a dielectric stripe (glass). Finally, the upper cladding refractive index was changed in order to retrieve the sensitivity of this device.